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CANGAS™ Features

CANGAS™ features are such that they afford the customer flexibility in installation and reliability in overall performance.

Gas Sensor Gas Sensor

The key features are:

  • Low power (no heating), high sensitivity
  • Small footprint
  • Fast response time
  • Wafer level element fabrication.
  • Wafer level or individual element sensing film application
  • Temperature stable quartz membrane
  • Applicable to numerous applications using polymer, metal, and oxide sensing films
  • Easily configured for sensor array
  • “Static bending” mode of operation
  • Concepts are applicable to thin film piezoelectric on silicon-based MEMS structures.
  • Patents Pending

Gas Sensors