CANGAS™ features are such that they afford the customer flexibility in installation and reliability in overall performance.
The key features are:
- Low power (no heating), high sensitivity
- Small footprint
- Fast response time
- Wafer level element fabrication.
- Wafer level or individual element sensing film application
- Temperature stable quartz membrane
- Applicable to numerous applications using polymer, metal, and oxide sensing films
- Easily configured for sensor array
- “Static bending” mode of operation
- Concepts are applicable to thin film piezoelectric on silicon-based MEMS structures.
- Patents Pending