AT-Cut HFF crystals are a terrific platform for high mass sensitivity gas sensing platforms.  By using chemical etching, BAW devices ranging from 50MHz to as high as 250MHz can be created, with reasonable yields and cost.  As a general rule of thumb, mass sensitivity is a function of frequency-squared, therefore a 100MHz inverted mesa crystal will be 100 times more mass sensitive than a 10MHz “traditional” BAW resonator.  Combined with the enhanced BAW temperature stability, inverted mesa platforms make an excellent solution when combined with various thin film sensor coatings. 

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